PVD(美國)

PVD Products

美國PVDProductswww.pvdproducts.com美國PVD公司為客戶提供優質的薄膜沉積設備，特別是大面積脈沖激光沉積(PLD)系統，還包括沉積元件如靶材操縱器和智能視窗等，另外可為客戶訂制激光分子束外延設備(L-MBE)。Dr.JamesA.GreerfoundedPVDProductsin1995todevelopandselllarge-areaPulsedLaserDepos itionsystems.InhispreviousjobatRaytheon’sResearchDivision,Dr.GreerdevelopedprototypeequipmentwithabilitytoscalethePLDprocessupto200mminsize.Soonafterward,Dr.GreerwonaPhaseIISBIRfromWrightPattersonAirForceBasetodevelopaPLDsystemtohandleupto5-inchdiametersubstrates.ThismachinewasspecificallydesignedtogrowHTSmaterialsandithasbeenusedtogrowhighqualityYBCOandothermaterialsonsubstratesupto125mm(5-inch)indiameter.TheoutcomeofthisSBIRwasthePLD5000system.In1996PVDProductswasmergedintoEpionCorporation.WhileatEpion,Dr.Greercontinuedtodevelopandselllarge-areaPLDsystemsaswellasotherthinfilmprocessingtoolsincludingGasCl