微機械激光光束偏轉(zhuǎn)器的特點：本產(chǎn)品為基于微光機電的微機械激光光束偏轉(zhuǎn)器（MEMS laser deflection mirror），微光機電激光光束掃描器， 也成為MEMS激光光束掃描鏡。廣泛應用于數(shù)據(jù)采集，投影以及其它各種應用場合。微機械光束掃描鏡可提供小尺寸，大掃描角度，高掃描頻率的產(chǎn)品，適用于各種小體積的產(chǎn)品中。本品為單個微機械激光光束掃描偏轉(zhuǎn)鏡，另外本系列產(chǎn)品還包含有1D微機械激光光束偏轉(zhuǎn)器（一維微光機電激光光束掃描偏轉(zhuǎn)器）及2D微機械激光光束偏轉(zhuǎn)器（二維微光機電激光掃描偏轉(zhuǎn)器）。

Micro mechanical scanning mirrors offer a high degree of miniaturization, high scan frequencies, high mechanical robustness and the potential for low cost manufacturing at high volumes. MEMS scanners are very promising especially for all and portable systems.

本微機械激光光束偏轉(zhuǎn)器（微光機電激光光束掃描偏轉(zhuǎn)鏡）指標如下：
MEMS Scanner
Scanner te                                     Electrostatic resonant 1D
Scanning frequency                            500 Hz … 50 kHz （≥ 200 Hz on request）
Optical scan angle （FOV）                     Depending on scanner, optical scan angle up to 80°
                                                       （mechanical scan angle  &plun;20°） supported
Active mirror diameter                         1 … 4 mm
Active mirror surface                           Aluminum, reflectivity 88 ... 90% in visible
wavelength range                              （400 … 700 nm）

Scan Head
Substrates with available technologies    Ceramic （standard）, gl or PCB on request
Sealing                                              Dust-proof
Optical interface                                 Dome with anti-reflective coating;
                                                        option: plane window on request
Mirror position control                          Optical, integrated in scan head, signal processing on driving electronics board
Electrical interface                               Flexible flat cable connected to sensor system
Module footprint                                 16 × 23 mm²
Working temperature                          0 … 45 °C （extended temperature range on request）

Driving Electronics Board
Dimensions                                         77 × 46 mm²
Supply voltage                                    5 V DC
Internally generated driving
voltage for scanner                             15 V … 200 V, max. 3 mA
Operating modes of thescanner control  amplitude-controlled （above 8° scanning angle） or voltage-controlled